LARGE VIBRATION AMPLITUDE REALIZED IN AN ALUMINUM NITRIDE PMUT.
Conference
·
OSTI ID:1141000
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1141000
- Report Number(s):
- SAND2014-2127C; 505353
- Country of Publication:
- United States
- Language:
- English
Similar Records
Resistive Switching in Aluminum Nitride.
Piezoelectric MEMS Based on Aluminum Nitride.
Radiation Testing of Aluminum Nitride Microresonators.
Conference
·
Fri Jun 01 00:00:00 EDT 2012
·
OSTI ID:1117141
Piezoelectric MEMS Based on Aluminum Nitride.
Conference
·
Wed Dec 31 23:00:00 EST 2014
·
OSTI ID:1244916
Radiation Testing of Aluminum Nitride Microresonators.
Conference
·
Sat Dec 31 23:00:00 EST 2011
·
OSTI ID:1074081