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Structural defects in GaN revealed by Transmission Electron Microscopy

Journal Article · · Japanese Journal of Applied Physics
 [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Materials Sciences Division
This paper reviews the various types of structural defects observed by Transmission Electron Microscopy in GaN heteroepitaxial layers grown on foreign substrates and homoepitaxial layers grown on bulk GaN substrates. The structural perfection of these layers is compared to the platelet self-standing crystals grown by High Nitrogen Pressure Solution. Defects in undoped and Mg doped GaN are discussed. Lastly, some models explaining the formation of inversion domains in heavily Mg doped layers that are possible defects responsible for the difficulties of p-doping in GaN are also reviewed.
Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1131027
Report Number(s):
LBNL--6624E
Journal Information:
Japanese Journal of Applied Physics, Journal Name: Japanese Journal of Applied Physics Journal Issue: 10 Vol. 53; ISSN 0021-4922
Publisher:
Japan Society of Applied PhysicsCopyright Statement
Country of Publication:
United States
Language:
English

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Cited By (3)

Three dimensional localization of unintentional oxygen impurities in gallium nitride journal January 2019
Nanopipe formation as a result of boron impurity segregation in gallium nitride grown by halogen-free vapor phase epitaxy journal December 2016
Atomic-scale quantitative analysis of implanted Mg in annealed GaN layers on free-standing GaN substrates journal December 2019

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