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Ovenized microelectromechanical system (MEMS) resonator

Patent ·
OSTI ID:1126693
; ;

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

Research Organization:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
8,669,823
Application Number:
13/442,689
OSTI ID:
1126693
Country of Publication:
United States
Language:
English

References (15)

Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators journal April 2007
Thermal Conductivity Measurement of Submicron-Thick Films Deposited on Substrates by Modified ac Calorimetry (Laser-Heating Ångstrom Method) journal January 2001
VHF and UHF mechanically coupled aluminum nitride MEMS filters conference May 2008
Oven-Based Thermally Tunable Aluminum Nitride Microresonators journal April 2013
Micro ion frequency standard conference May 2011
Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films journal October 2004
Fully monolithic CMOS nickel micromechanical resonator oscillator conference January 2008
Super high frequency width extensional aluminum nitride (AlN) MEMS resonators conference September 2009
Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators conference June 2009
Frequency Trimming for MEMS Resonator Oscillators conference May 2007
Ovenized and thermally tunable aluminum nitride microresonators conference October 2010
Thermal Isolation of Encapsulated MEMS Resonators journal February 2008
Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
  • 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum https://doi.org/10.1109/FREQ.2007.4319108
conference May 2007
Technologies for Cofabricating MEMS and Electronics journal February 2008
Thermal Conductivity of AlN and SiC Thin Films journal May 2006

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