Langasite surface acoustic wave gas sensors: modeling and verification
We report finite element simulations of the effect of conductive sensing layers on the surface wave velocity of langasite substrates. The simulations include both the mechanical and electrical influences of the conducting sensing layer. We show that three-dimensional simulations are necessary because of the out-of-plane displacements of the commonly used (0, 138.5, 26.7) Euler angle. Measurements of the transducer input admittance in reflective delay-line devices yield a value for the electromechanical coupling coefficient that is in good agreement with the three-dimensional simulations on bare langasite substrate. The input admittance measurements also show evidence of excitation of an additional wave mode and excess loss due to the finger resistance. The results of these simulations and measurements will be useful in the design of surface acoustic wave gas sensors.
- Research Organization:
- National Energy Technology Lab. (NETL), Pittsburgh, PA, and Morgantown, WV (United States). In-house Research; National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV (United States)
- Sponsoring Organization:
- USDOE Office of Fossil Energy (FE)
- DOE Contract Number:
- DE-FE0004000
- OSTI ID:
- 1123823
- Report Number(s):
- TPR-3927
- Journal Information:
- IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 60, Issue 3; ISSN 0885-3010
- Country of Publication:
- United States
- Language:
- English
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