Influence of Langasite Crystal Orientation on Hydrogen Gas Detection up to 400°C
- Univ. of Maine, Orono, ME (United States); University of Maine
- Univ. of Maine, Orono, ME (United States)
Hydrogen gas sensors are of great importance due to the explosive nature and volatility of H2 at concentrations above 4%. Also important is the capability of operation at high temperatures in harsh industrial environments, aerospace, automotive, and power generation applications. Surface Acoustic Wave (SAW) technology offers many desirable properties for sensor fabrication, such as the capability of wireless and battery free operation, mass-production, small size and weight. Piezoelectric substrates or thin films, such as langasite and aluminum nitrate, exist that allow SAW devices to operate at high temperatures. Langasite SAW-based devices have been previously demonstrated as temperature, strain and gas sensors. For high temperature SAW-based gas sensors, sensitive films capable to react selectively with the target species are normally used. This work presents the detection of hydrogen gas at high-temperature (up to 470 C) using SAW resonators on the commercially available LGS plane described by Euler angles {0°, 138.5°,Ψ}. The Pt-Al2O3 composite thin film is used as both the electrode and sensitive layer. Devices fabricated along different crystal orientations on the same wafer revealed different sensitivities to H2, which were also measured as a function of temperature up to 470 C. These different sensitivities to H2 open the possibility of using different orientations of this commercially available LGS crystal cut to fabricate sensors capable of operating as a network, and detecting different measurands at high-temperature, including hydrogen gas.
- Research Organization:
- Univ. of Maine, Orono, ME (United States)
- Sponsoring Organization:
- USDOE Office of Fossil Energy (FE)
- Grant/Contract Number:
- FE0026217
- OSTI ID:
- 1864972
- Journal Information:
- IEEE International Ultrasonics Symposium, Journal Name: IEEE International Ultrasonics Symposium Vol. 2019; ISSN 1948-5727
- Publisher:
- IEEECopyright Statement
- Country of Publication:
- United States
- Language:
- English
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