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Pyrolysis of 2D and 3D Interferometrically Patterned Resist Structures.

Journal Article · · Journal of Vacuum Science and Technology - B
DOI:https://doi.org/10.1116/1.3495756· OSTI ID:1123421
; ; ;
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1123421
Report Number(s):
SAND2010-3929J; 492229
Journal Information:
Journal of Vacuum Science and Technology - B, Journal Name: Journal of Vacuum Science and Technology - B Journal Issue: 6 Vol. 28; ISSN 1071-1023
Country of Publication:
United States
Language:
English

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