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Rapid Thermal Pyrolysis of Interferometrically Patterned Resist.

Journal Article · · Carbon
OSTI ID:1106646

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1106646
Report Number(s):
SAND2011-4944J; 464003
Journal Information:
Carbon, Journal Name: Carbon
Country of Publication:
United States
Language:
English

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