Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

An Integrated MEMS Vacuum Diode.

Conference ·
OSTI ID:1106113

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1106113
Report Number(s):
SAND2011-4813C; 463951
Country of Publication:
United States
Language:
English

Similar Records

Optical MEMS for integrated atomic systems.
Conference · Thu Nov 01 00:00:00 EDT 2007 · OSTI ID:1147453

Integrating MOFs with MEMS Devices for Chemical Sensing.
Conference · Thu Feb 28 23:00:00 EST 2013 · OSTI ID:1115964

Diode-Integrated SiC DMOSFETs.
Conference · Thu Jan 31 23:00:00 EST 2019 · OSTI ID:1601934

Related Subjects