Stress compensation in hafnia/silica optical coatings by inclusion of alumina layers

Oliver, J. B.; Kupinski, P.; Rigatti, A. L.; Schmid, A. W.; Lambropoulos, J. C.; Papernov, S.; Kozlov, A.; Smith, C.; Hand, R. D.

doi:10.1364/oe.20.016596

Stress compensation in hafnia/silica optical coatings by inclusion of alumina layers

Journal Article · Mon Jul 09 00:00:00 EDT 2012 · Optics Express

DOI:https://doi.org/10.1364/oe.20.016596· OSTI ID:1093560

Oliver, J. B. ^[1]; Kupinski, P.; Rigatti, A. L.; Schmid, A. W.; Lambropoulos, J. C.; Papernov, S.; Kozlov, A.; Smith, C.; Hand, R. D.

Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14623

Hafnium dioxide films deposited using electron-beam evaporation tend to exhibit high tensile stresses, particularly when deposited on low-thermal-expansion substrates for use in a low-relative-humidity environment. Hafnia has been shown to be a critical material, however, for use in high-peak-power laser coatings, providing exceptional deposition control and laser-damage resistance. To correct for tensile thin-film stresses in hafnia/silica multilayer coatings, alumina compensation layers were incorporated in the multilayer design. Determination of the stresses resulting from alumina layers in different coating designs has led to the realization of the influence of water diffusion and the diffusion-barrier properties of alumina that must be considered. The inclusion of alumina layers in a hafnia/silica multilayer provides the ability to produce low-compressive-stress, high-laser-damage-threshold coatings.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Rochester, NY (United States). Lab. for Laser Energetics

Sponsoring Organization:: USDOE

Grant/Contract Number:: FC52-08NA28302

OSTI ID:: 1093560

Report Number(s):: DOE/NA/28302-1066; 2012-7; 2042

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 15 Vol. 20; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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