Methods for fabrication of positional and compositionally controlled nanostructures on substrate
Patent
·
OSTI ID:1087891
Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.
- Research Organization:
- Univ. of California, Oakland, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Number(s):
- 8,486,287
- Application Number:
- 10/599,106
- OSTI ID:
- 1087891
- Country of Publication:
- United States
- Language:
- English
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