Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1087066
- Report Number(s):
- BNL-101189-2013-JA; R&D Project: NC-001
- Journal Information:
- Nano Letters, Vol. 13, Issue 4; ISSN 1530-6984
- Publisher:
- American Chemical Society
- Country of Publication:
- United States
- Language:
- English
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