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Graphene-based structure, method of suspending graphene membrane, and method of depositing material onto graphene membrane

Patent ·
OSTI ID:1083918
;
An embodiment of a method of suspending a graphene membrane across a gap in a support structure includes attaching graphene to a substrate. A pre-fabricated support structure having the gap is attached to the graphene. The graphene and the pre-fabricated support structure are then separated from the substrate which leaves the graphene membrane suspended across the gap in the pre-fabricated support structure. An embodiment of a method of depositing material includes placing a support structure having a graphene membrane suspended across a gap under vacuum. A precursor is adsorbed to a surface of the graphene membrane. A portion of the graphene membrane is exposed to a focused electron beam which deposits a material from the precursor onto the graphene membrane. An embodiment of a graphene-based structure includes a support structure having a gap, a graphene membrane suspended across the gap, and a material deposited in a pattern on the graphene membrane.
Research Organization:
The Regents of the University of California (Oakland, CA)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-05CH11231
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Number(s):
8,409,450
Application Number:
12/409,938
OSTI ID:
1083918
Country of Publication:
United States
Language:
English

References (12)

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DFT investigation of the adsorption of atomic hydrogen on a cluster-model graphite surface journal January 1999
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Relativistic Hartree–Fock X-ray and electron scattering factors journal May 1968
The structure of suspended graphene sheets journal March 2007
Imaging and dynamics of light atoms and molecules on graphene journal July 2008
One nanometer structure fabrication using electron beam induced deposition journal April 2006
Atomic Structure of Graphene on SiO2 journal June 2007
Electron atomic scattering factors and scattering potentials of crystals journal December 1999
Formation of Ion Irradiation Induced Small-Scale Defects on Graphite Surfaces journal July 1996
Freestanding Nanosheets from Crosslinked Biphenyl Self-Assembled Monolayers journal November 2005
The two-dimensional phase of boron nitride: Few-atomic-layer sheets and suspended membranes journal March 2008

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36 MATERIALS SCIENCE