Modulated microwave microscopy and probes used therewith
A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.
- Research Organization:
- Leland Stanford Junior University (Stanford, CA)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG033-01ER45929-A001; FG36-08GOU7994
- Assignee:
- The Board of Trustees of Leland Stanford Junior University (Stanford, CA)
- Patent Number(s):
- 8,266,718
- Application Number:
- 12/706,190
- OSTI ID:
- 1078319
- Country of Publication:
- United States
- Language:
- English
Near-field microwave microscope with improved sensitivity and spatial resolution
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journal | June 2003 |
Calibration of shielded microwave probes using bulk dielectrics
|
journal | September 2008 |
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