UV laser ablation of parylene films from gold substrates
Journal Article
·
· Journal of Material Science
OSTI ID:1054759
Parylene films, coating gold substrates, were removed by laser ablation using 248 nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three different environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and x-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were estimated.
- Research Organization:
- Kansas City Plant (KCP), Kansas City, MO (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-01AL66850
- OSTI ID:
- 1054759
- Report Number(s):
- KCP-613-8683
- Journal Information:
- Journal of Material Science, Journal Name: Journal of Material Science
- Country of Publication:
- United States
- Language:
- English
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