Ablation of hexagonal boron nitride by UV laser radiation
Journal Article
·
· Quantum Electronics (Woodbury, N.Y.)
- General Physics Institute, Russian Academy of Sciences, ul. Vavilova 38, 119991 Moscow (Russian Federation)
We report an experimental study of ablation of hexagonal boron nitride ceramics irradiated by 193- and 248-nm laser pulses. The dependences of the material removal rate and the crater wall slope on the energy density in the irradiation spot are obtained. An ablation regime is found, when the material removal rate reaches 5 mm per pulse, which is not typical of nanosecond laser radiation. It is shown that at relatively low radiation intensities (about 5–10 J cm{sup −2}), the slope angle of the formed crater wall does not exceed 20°. (interaction of laser radiation with matter)
- OSTI ID:
- 23004853
- Journal Information:
- Quantum Electronics (Woodbury, N.Y.), Journal Name: Quantum Electronics (Woodbury, N.Y.) Journal Issue: 11 Vol. 48; ISSN 1063-7818; ISSN QUELEZ
- Country of Publication:
- United States
- Language:
- English
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