Damage Profiles and Ion Distribution in Pt-irradiated SiC

Journal Article · Sun Jan 01 04:00:00 EST 2012 · Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

DOI:https://doi.org/10.1016/j.nimb.2012.02.014· OSTI ID:1049074

Xue, Haizhou ^[1]; Zhang, Yanwen ^[2]; Zhu, Zihua ^[3]; Zhang, Weiming ^[4]; Bae, Dr In-Tae ^[5]; Weber, William J ^[2]

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1. University of Tennessee, Knoxville (UTK)
2. ORNL
3. Pacific Northwest National Laboratory (PNNL)
4. Peking University
5. State University of New York, Binghamton

Single crystalline 6H-SiC samples were irradiated at 150 K using 2MeV Pt ions. Local volume swelling is determined by electron energy loss spectroscopy (EELS), a nearly sigmoidal dependence with irradiation dose is observed. The disorder profiles and ion distribution are determined by Rutherford backscattering spectrometry (RBS), transmission electron microscopy and secondary ion mass spectrum. Since the volume swelling reaches 12% over the damage region under high ion fluence, lattice expansion is considered and corrected during the data analysis of RBS spectra to obtain depth profiles. Projectile and damage profiles are estimated by SRIM (Stopping and Range of Ions in Matter). Comparing with the measured profiles, SRIM code significantly overestimates the electronic stopping power for the slow heavy Pt ions, and large derivations are observed in the predicted ion distribution and the damage profiles. Utilizing the reciprocity method that is based on the invariance of the inelastic excitation in ion atom collisions against interchange of projectile and target, much lower electronic stopping is deduced. A simple approach based on reducing the density of SiC target in SRIM simulation is proposed to compensate the overestimated SRIM electronic stopping power values. Better damage profile and ion range are predicted.

• Research Organization: Oak Ridge National Laboratory (ORNL)
• Sponsoring Organization: SC USDOE - Office of Science (SC)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 1049074
• Journal Information: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Journal Name: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 286; ISSN 0168-583X
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
DATA ANALYSIS
DISTRIBUTION
ELECTRONS
ENERGY-LOSS SPECTROSCOPY
EXCITATION
ION-ATOM COLLISIONS
IRRADIATION
PROJECTILES
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SIMULATION
SPECTRA
STOPPING POWER
SWELLING
TARGETS
TRANSMISSION ELECTRON MICROSCOPY