Solution-Based Synthesis of Crystalline Silicon from Liquid Silane through Laser and Chemical Annealing

Iyer, Ganjigunte R.  S.; Hobbie, Erik K.; Guruvenket, Srinivasan; Hoey, Justin M.; Anderson, Kenneth J.; Lovaasen, John; Gette, Cody; Schulz, Douglas L.; Swenson, Orven F.; Elangovan, Arumugasamy; Boudjouk, P.

doi:10.1021/am300334p

Solution-Based Synthesis of Crystalline Silicon from Liquid Silane through Laser and Chemical Annealing

Journal Article · Wed May 23 00:00:00 EDT 2012 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/am300334p· OSTI ID:1046826

Iyer, Ganjigunte R. S. ^[1]; Hobbie, Erik K.; Guruvenket, Srinivasan; Hoey, Justin M.; Anderson, Kenneth J.; Lovaasen, John; Gette, Cody; Schulz, Douglas L.; Swenson, Orven F.; Elangovan, Arumugasamy; Boudjouk, P.

North Dakota State University

We report a solution process for the synthesis of crystalline silicon from the liquid silane precursor cyclohexasilane (Si₆H₁₂). Polysilane films were crystallized through thermal and laser annealing, with plasma hydrogenation at atmospheric pressure generating further structural changes in the films. The evolution from amorphous to microcrystalline is characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and impedance spectroscopy. A four-decade enhancement in the electrical conductivity is attributed to a disorder-order transition in a bonded Si network. Lastly, our results demonstrate a potentially attractive approach that employs a solution process coupled with ambient post-processing to produce crystalline silicon thin films.

View Accepted Manuscript (DOE)

Research Organization:: North Dakota State Univ., Fargo, ND (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

Grant/Contract Number:: FG36-08GO88160

OSTI ID:: 1046826

Report Number(s):: DOE/GO/88160--44

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 5 Vol. 4; ISSN 1944-8244

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Solution-Based Fabrication of Polycrystalline Si Thin-Film Transistors from Recycled Polysilanes Sberna, Paolo M.; Trifunovic, Miki; Ishihara, Ryoichi ACS Sustainable Chemistry & Engineering, Vol. 5, Issue 7 https://doi.org/10.1021/acssuschemeng.7b00626	journal	June 2017
Printed Diodes: Materials Processing, Fabrication, and Applications Chu, Yihang; Qian, Chunqi; Chahal, Premjeet Advanced Science, Vol. 6, Issue 6 https://doi.org/10.1002/advs.201801653	journal	January 2019
Branched Hydrosilane Oligomers as Ideal Precursors for Liquid-Based Silicon-Film Deposition Haas, Michael; Christopoulos, Viktor; Radebner, Judith Angewandte Chemie, Vol. 129, Issue 45 https://doi.org/10.1002/ange.201707525	journal	October 2017
Branched Hydrosilane Oligomers as Ideal Precursors for Liquid-Based Silicon-Film Deposition Haas, Michael; Christopoulos, Viktor; Radebner, Judith Angewandte Chemie International Edition, Vol. 56, Issue 45 https://doi.org/10.1002/anie.201707525	journal	October 2017
Fabrication of n-type Si nanostructures by direct nanoimprinting with liquid-Si ink Takagishi, Hideyuki; Masuda, Takashi; Yamazaki, Ken AIP Advances, Vol. 8, Issue 1 https://doi.org/10.1063/1.5011449	journal	January 2018
Nonthermal plasma synthesis of silicon nanoparticles and their thermal transport properties Juangsa, Firman Bagja; Ryu, Meguya; Morikawa, Junko Journal of Physics D: Applied Physics, Vol. 51, Issue 50 https://doi.org/10.1088/1361-6463/aae3a6	journal	October 2018

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