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Title: Method for generating small and ultra small apertures, slits, nozzles and orifices

Abstract

A method and device for one or more small apertures, slits, nozzles and orifices, preferably having a high aspect ratio. In one embodiment, one or more alternating layers of sacrificial layers and blocking layers are deposited onto a substrate. Each sacrificial layer is made of a material which preferably allows a radiation to substantially pass through. Each blocking layer is made of a material which substantially blocks the radiation.

Inventors:
 [1]
  1. Hinsdale, IL
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1042631
Patent Number(s):
8,182,870
Application Number:
12/128,696
Assignee:
The United States of America as represented by the United States Department of Energy (Washington, DC) ANL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Khounsary, Ali M. Method for generating small and ultra small apertures, slits, nozzles and orifices. United States: N. p., 2012. Web.
Khounsary, Ali M. Method for generating small and ultra small apertures, slits, nozzles and orifices. United States.
Khounsary, Ali M. Tue . "Method for generating small and ultra small apertures, slits, nozzles and orifices". United States. https://www.osti.gov/servlets/purl/1042631.
@article{osti_1042631,
title = {Method for generating small and ultra small apertures, slits, nozzles and orifices},
author = {Khounsary, Ali M},
abstractNote = {A method and device for one or more small apertures, slits, nozzles and orifices, preferably having a high aspect ratio. In one embodiment, one or more alternating layers of sacrificial layers and blocking layers are deposited onto a substrate. Each sacrificial layer is made of a material which preferably allows a radiation to substantially pass through. Each blocking layer is made of a material which substantially blocks the radiation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 22 00:00:00 EDT 2012},
month = {Tue May 22 00:00:00 EDT 2012}
}

Patent:

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