Method for generating small and ultra small apertures, slits, nozzles and orifices

Patent · Tue May 22 00:00:00 EDT 2012

OSTI ID:1042631

Khounsary, Ali M ^[1]

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1. Hinsdale, IL

A method and device for one or more small apertures, slits, nozzles and orifices, preferably having a high aspect ratio. In one embodiment, one or more alternating layers of sacrificial layers and blocking layers are deposited onto a substrate. Each sacrificial layer is made of a material which preferably allows a radiation to substantially pass through. Each blocking layer is made of a material which substantially blocks the radiation.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC02-06CH11357
• Assignee: The United States of America as represented by the United States Department of Energy (Washington, DC)
• Patent Number(s): 8,182,870
• Application Number: 12/128,696
• OSTI ID: 1042631
• Country of Publication: United States
• Language: English

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