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In-situ characterization of rapid crystallization of amorphous CoFeB electrods in CoFeB/MgO/CoFeB junctions during thermal annealing.

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3273397· OSTI ID:1041133
We report the crystallization study of CoFeB/MgO/CoFeB magnetic tunnel junctions using in-situ, time-resolved synchrotron-based x-ray diffraction and transmission electron microscopy. It was found that the crystallization of amorphous CoFeB electrodes occurs on a time scale of seconds during the postgrowth high temperature annealing. The crystallization can be well fit by the Johnson-Mehl-Avrami model and the effective activation energy of the process was determined to be 150 kJ/mol. The solid-state epitaxy mode of CoFeB was found to involve separate crystallization at different locations followed by subsequent merging of small grains, instead of layer-by-layer growth of CoFeB film along the MgO template.
Research Organization:
BROOKHAVEN NATIONAL LABORATORY (BNL)
Sponsoring Organization:
USDOE SC OFFICE OF SCIENCE (SC)
DOE Contract Number:
AC02-98CH10886
OSTI ID:
1041133
Report Number(s):
BNL--90919-2010-JA; BR0204011
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 24 Vol. 95; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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