A microsystems enabled field desorption source.
Conference
·
OSTI ID:1021710
- University of New Mexico, Albuquerque, NM
- SRI International, Menlo Park, CA
- Idaho National Laboratory, Idaho Falls, ID
Technologies that have been developed for microelectromechanical systems (MEMS) have been applied to the fabrication of field desorption arrays. These techniques include the use of thick films for enhanced dielectric stand-off, as well as an integrated gate electrode. The increased complexity of MEMS fabrication provides enhanced design flexibility over traditional methods.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1021710
- Report Number(s):
- SAND2010-5097C; TRN: US201117%%301
- Resource Relation:
- Conference: Proposed for presentation at the 23rd International Vacuum Nanoelectronics Conference held July 26-30, 2010 in Palo Alto, CA.
- Country of Publication:
- United States
- Language:
- English
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