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Title: Integrated field emission array for ion desorption

Abstract

An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.

Inventors:
; ; ; ;
Publication Date:
Research Org.:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1093376
Patent Number(s):
8,536,564
Application Number:
13/246,985
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Resnick, Paul J, Hertz, Kristin L, Holland, Christopher, Chichester, David, and Schwoebel, Paul. Integrated field emission array for ion desorption. United States: N. p., 2013. Web.
Resnick, Paul J, Hertz, Kristin L, Holland, Christopher, Chichester, David, & Schwoebel, Paul. Integrated field emission array for ion desorption. United States.
Resnick, Paul J, Hertz, Kristin L, Holland, Christopher, Chichester, David, and Schwoebel, Paul. Tue . "Integrated field emission array for ion desorption". United States. https://www.osti.gov/servlets/purl/1093376.
@article{osti_1093376,
title = {Integrated field emission array for ion desorption},
author = {Resnick, Paul J and Hertz, Kristin L and Holland, Christopher and Chichester, David and Schwoebel, Paul},
abstractNote = {An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {9}
}

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