LCLS X-ray mirror measurements using a large aperture visible light interferometer
Synchrotron or FEL X-ray mirrors are required to deliver an X-ray beam from its source to an experiment location, without contributing significantly to wave front distortion. Accurate mirror figure measurements are required prior to installation to meet this intent. This paper describes how a 300 mm aperture phasing interferometer was calibrated to <1 nm absolute accuracy and used to mount and measure 450 mm long flats for the Linear Coherent Light Source (LCLS) at Stanford Linear Accelerator Center. Measuring focus mirrors with an interferometer requires additional calibration, because high fringe density introduces systematic errors from the interferometer's imaging optics. This paper describes how these errors can be measured and corrected. The calibration approaches described here apply equally well to interferometers larger than 300 mm aperture, which are becoming more common in optics laboratories. The objective of this effort was to install LCLS flats with < 10 nm of spherical curvature, and < 2 nm rms a-sphere. The objective was met by measuring the mirrors after fabrication, coating and mounting, using a 300 mm aperture phasing interferometer calibrated to an accuracy < 1 nm. The key to calibrating the interferometer accurately was to sample the error using independent geometries that are available. The results of those measurements helped identify and reduce calibration error sources. The approach used to measure flats applies equally well to focus mirrors, provided an additional calibration is performed to measure the error introduced by fringe density. This calibration has been performed on the 300 mm aperture interferometer, and the measurement correction was evaluated for a typical focus mirror. The 300 mm aperture limitation requires stitching figure measurements together for many X-ray mirrors of interest, introducing another possible error source. Stitching is eliminated by applying the calibrations described above to larger aperture instruments. The authors are presently extending this work to a 600 mm instrument. Instruments with 900 mm aperture are now becoming available, which would accommodate the largest mirrors of interest.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 1021539
- Report Number(s):
- LLNL-CONF-472682; TRN: US1104020
- Resource Relation:
- Conference: Presented at: LCLS X-ray mirror measurements using a large aperture visible light interferometer, Oxford, United Kingdom, Apr 04 - Apr 06, 2011
- Country of Publication:
- United States
- Language:
- English
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