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NanoFIBrication of ultra high aspect ration vias in silicon.

Conference ·
OSTI ID:1020539
 [1];  [1]; ;  [1]; ;
  1. University of New Mexico, Albuquerque, NM
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No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1020539
Report Number(s):
SAND2010-3780C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
ASPECT RATIO
MECHANICAL ENGINEERING
SILICON