Fabrication of cubic micron-scale 3D metamaterial resonators.
Conference
·
OSTI ID:1020362
We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1020362
- Report Number(s):
- SAND2010-3774C
- Country of Publication:
- United States
- Language:
- English
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