Fabrication techniques for 3D metamaterials in the mid-infrared.

Conference · Sat May 01 04:00:00 EDT 2010

OSTI ID:1019077

Ellis, A Robert; Sinclair, Michael B; Brener, Igal; Wendt, Joel Robert; Burckel, David Bruce; Ten Eyck, Gregory A

The authors have developed two versions of a flexible fabrication technique known as membrane projection lithography that can produce nearly arbitrary patterns in '212 D' and fully three-dimensional (3D) structures. The authors have applied this new technique to the fabrication of split ring resonator-based metamaterials in the midinfrared. The technique utilizes electron beam lithography for resolution, pattern design flexibility, and alignment. The resulting structures are nearly three orders of magnitude smaller than equivalent microwave structures that were first used to demonstrate a negative index material. The fully 3D structures are highly isotropic and exhibit both electrically and magnetically excited resonances for incident transverse electromagnetic waves.

• Research Organization: Sandia National Laboratories
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1019077
• Report Number(s): SAND2010-3561C
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALIGNMENT
DESIGN
ELECTROMAGNETIC RADIATION
ELECTRON BEAMS
FABRICATION
FLEXIBILITY
MEMBRANES
PHOTON BEAMS
RESOLUTION