The chemistry of particulate formation in fluorocarbon plasmas
The production, suspension and transport of fluorocarbon particulates in rf discharges have been studied using in situ laser light scattering and ex situ chemical analysis. The time evolution of the spatial distribution of suspended particles was obtained by 2-D imaging of the scattered light. The chemistry of the discharge was varied by the use of a range of pure fluorocarbon gases and mixtures with argon, oxygen and hydrogen-containing molecules. The addition of hydrogen to a fluorocarbon discharge increases the rate of formation of particles although these powders are found by FTIR to contain negligible hydrogen. Particle formation rates correlate with polymer deposition rates and are independent of apparatus history. It is proposed that this is a clear example of gas-phase rather than surface processes leading to particle nucleation and growth.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10188985
- Report Number(s):
- SAND--93-2057C; CONF-9308151--2; ON: DE94001500; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
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