ATOMIC FORCE LITHOGRAPHY OF NANO MICROFLUIDIC CHANNELS FOR VERIFICATION AND MONITORING IN AQUEOUS SOLUTIONS
The growing interest in the physics of fluidic flow in nanoscale channels, as well as the possibility for high sensitive detection of ions and single molecules is driving the development of nanofluidic channels. The enrichment of charged analytes due to electric field-controlled flow and surface charge/dipole interactions along the channel can lead to enhancement of sensitivity and limits-of-detection in sensor instruments. Nuclear material processing, waste remediation, and nuclear non-proliferation applications can greatly benefit from this capability. Atomic force microscopy (AFM) provides a low-cost alternative for the machining of disposable nanochannels. The small AFM tip diameter (< 10 nm) can provide for features at scales restricted in conventional optical and electron-beam lithography. This work presents preliminary results on the fabrication of nano/microfluidic channels on polymer films deposited on quartz substrates by AFM lithography.
- Research Organization:
- SRS
- Sponsoring Organization:
- DOE
- DOE Contract Number:
- AC09-08SR22470
- OSTI ID:
- 1016387
- Report Number(s):
- SRNL-STI-2011-00351
- Country of Publication:
- United States
- Language:
- English
Similar Records
Nanofluidic interfaces in microfluidic networks
Integrated microchip incorporating atomic magnetometer and microfluidic channel for NMR and MRI