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Title: Direct retrieval of crystal structures by maximum entropy analysis of incoherent Z-contrast images

Conference ·
OSTI ID:10158917

In Z-contrast imaging in a STEM, the incoherent image can be interpreted as a convolution between the incident electron probe and the projected crystal structure. Deconvolution routines can be used to retrieve the lattice, particularly with the image processing technique of maximum entropy (based on Bayesian probability). A graded SiGe structure, Si, and GaAs are used as examples.

Research Organization:
Oak Ridge National Lab., TN (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC05-84OR21400
OSTI ID:
10158917
Report Number(s):
CONF-940753-18; ON: DE94013262
Resource Relation:
Conference: Microscopy Society of America and Microbeam Analysis Society joint meeting,New Orleans, LA (United States),31 Jul - 5 Aug 1994; Other Information: PBD: Mar 1994
Country of Publication:
United States
Language:
English