A Fabry--Perot microinterferometer for visible wavelengths
We report here on our efforts to develop a silicon-based microinterferometer for optical applications in the visible spectral region using micromachining fabrication techniques. The interferometer is formed by two parallel dielectric mirrors supported on membranes which are electrostatically deflected for wavelength control. A simplified two-wafer fabrication process has been designed and investigated. We have obtained 250 nm membrane deflection for an applied voltage of 100 V. Hafnium dioxide-silicon dioxide dielectric mirrors have been fabricated on membrane supports and also free-standing with high reflectivity and low stress. Optical transmission of fixed mirrors yield 1.6 nm spectral resolution at 450 nm wavelength with significant signal and selectivity. Anticipated applications include microinstrument spectroscopy systems for atomic absorption, ellipsometry, imaging, optical fiber communications, and general spectrophotometer uses as well as accelerometry.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 10152387
- Report Number(s):
- UCRL-JC-109342; CONF-9206172-3; ON: DE93012478
- Resource Relation:
- Conference: Solid state sensor and actuator workshop,Hilton Head Island, SC (United States),21-25 Jun 1992; Other Information: PBD: Apr 1992
- Country of Publication:
- United States
- Language:
- English
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