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Compilation of diamond-like carbon properties for barriers and hard coatings

Technical Report ·
DOI:https://doi.org/10.2172/10151476· OSTI ID:10151476
; ; ; ; ; ; ;  [1];  [2]
  1. Sandia National Labs., Livermore, CA (United States)
  2. Sandia National Labs., Albuquerque, NM (United States)
Diamond-like carbon (DLC) is an amorphous form of carbon which resembles diamond in its hardness, lubricity, and resistance to chemical attack. Such properties make DLC of interest for use in barrier and hard coating technology. This report examines a variety of properties of DLC coatings. This includes examining substrates on which DLC coatings can be deposited; the resistance of DLC coatings to various chemical agents; adhension of DLC coatings; and characterization of DLC coatings by electron microscopy, FTIR, sputter depth profiling, stress measurements and nanoindentation.
Research Organization:
Sandia National Labs., Livermore, CA (United States); Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC04-76DR00789
OSTI ID:
10151476
Report Number(s):
SAND--94-8219B; ON: DE94012139
Country of Publication:
United States
Language:
English

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