skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Illuminators for extreme ultraviolet lithography cameras with ring fields

Abstract

Scanning, ring-field lithographic cameras designed for 14-nm radiation can print 100-nm features on large chips. Mating high-efficiency illuminators are described.

Authors:
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10134858
Report Number(s):
SAND-94-0236C; CONF-9406116-3
ON: DE94008423; BR: GB0103012
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Optical Society of America meeting on diffractive optics: design, fabrication and applications,Rochester, NY (United States),6-8 Jun 1994; Other Information: PBD: [1994]
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; INTEGRATED CIRCUITS; FABRICATION; RESOLUTION; EXTREME ULTRAVIOLET RADIATION; OPTICAL SYSTEMS; LASER RADIATION; 426000; COMPONENTS, ELECTRON DEVICES AND CIRCUITS

Citation Formats

Sweatt, W.C. Illuminators for extreme ultraviolet lithography cameras with ring fields. United States: N. p., 1994. Web.
Sweatt, W.C. Illuminators for extreme ultraviolet lithography cameras with ring fields. United States.
Sweatt, W.C. Tue . "Illuminators for extreme ultraviolet lithography cameras with ring fields". United States. https://www.osti.gov/servlets/purl/10134858.
@article{osti_10134858,
title = {Illuminators for extreme ultraviolet lithography cameras with ring fields},
author = {Sweatt, W.C.},
abstractNote = {Scanning, ring-field lithographic cameras designed for 14-nm radiation can print 100-nm features on large chips. Mating high-efficiency illuminators are described.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {3}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: