Advances in MOVPE compound semiconductor epitaxy manufacturing technology: From high throughput large area reactors to cluster tools
- Emcore Corp., Somerset, NJ (United States); and others
Short communication.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10120696
- Report Number(s):
- SAND--93-2702C; CONF-940588--1; ON: DE94006367; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
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