Advances in MOVPE compound semiconductor epitaxy manufacturing technology: From high throughput large area reactors to cluster tools
- Emcore Corp., Somerset, NJ (United States); and others
Short communication.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10120696
- Report Number(s):
- SAND-93-2702C; CONF-940588-1; ON: DE94006367; BR: GB0103012
- Resource Relation:
- Conference: 1994 conference on GaAs manufacturing,Las Vegas, NV (United States),2-5 May 1994; Other Information: PBD: [1993]
- Country of Publication:
- United States
- Language:
- English
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