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Title: Advances in MOVPE compound semiconductor epitaxy manufacturing technology: From high throughput large area reactors to cluster tools

Technical Report ·
DOI:https://doi.org/10.2172/10120696· OSTI ID:10120696
; ;  [1]
  1. Emcore Corp., Somerset, NJ (United States); and others

Short communication.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
10120696
Report Number(s):
SAND-93-2702C; CONF-940588-1; ON: DE94006367; BR: GB0103012
Resource Relation:
Conference: 1994 conference on GaAs manufacturing,Las Vegas, NV (United States),2-5 May 1994; Other Information: PBD: [1993]
Country of Publication:
United States
Language:
English