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Next frontier for MEMS-IC integration : Aluminum Nitride (AlN) frequency references, filters and sensors.... drivers and challenges.

Conference ·
OSTI ID:1011700
; ; ; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1011700
Report Number(s):
SAND2010-2732C
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
ALUMINIUM NITRIDES
FILTERS
INTEGRATED CIRCUITS
MICROELECTRONICS
SENSORS
TECHNOLOGY ASSESSMENT