Super High Frequency Width Extensional Aluminum Nitride (AlN) MEMS Resonators.
Conference
·
OSTI ID:1141323
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1141323
- Report Number(s):
- SAND2009-6089C; 506656
- Country of Publication:
- United States
- Language:
- English
Similar Records
Super high frequency width extensional aluminum nitride MEMS resonators.
Stability Experiments on MEMS Aluminum Nitride RF Resonators.
Piezoelectric MEMS Based on Aluminum Nitride.
Conference
·
Sat Feb 28 23:00:00 EST 2009
·
OSTI ID:950910
Stability Experiments on MEMS Aluminum Nitride RF Resonators.
Conference
·
Mon Nov 30 23:00:00 EST 2009
·
OSTI ID:1141512
Piezoelectric MEMS Based on Aluminum Nitride.
Conference
·
Wed Dec 31 23:00:00 EST 2014
·
OSTI ID:1244916