Simultaneous Formation of Surface Ripples and Metallic Nanodots Induced by Phase Decomposition and Focused Ion Beam Patterning

Journal Article · Sun Jan 01 04:00:00 EST 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2181203· OSTI ID:1003407

Lian, Jie ^[1]; Zhou, Wei ^[2]; Wei, Q. M. ^[1]; Wang, L. M. ^[1]; Boatner, Lynn A ^[3]; Ewing, Rodney C. ^[1]

---

1. University of Michigan
2. Nanyang Technological University
3. ORNL

We report the simultaneous formation of self-assembled surface ripples in Cd{sub 2}Nb{sub 2}O{sub 7} pyrochlore caused by focused ion beam (FIB) patterning and uniformly distributed metallic nanodots induced by phase decomposition under ion bombardment. The characteristic wavelength of the surface ripples is controllable from the nm to the sub-{micro}m scale. High-density Cd metallic nanoparticles, {approx} 5 nm, formed and the distribution of nanoparticles is consistent with the morphological characteristics of the ripple pattern. This approach provides a means of fabricating surface nanostructure with various patterns and a controllable particle size and distribution by combining ion beam-induced phase decomposition with high-precision FIB patterning.

• Research Organization: Oak Ridge National Laboratory (ORNL)
• Sponsoring Organization: SC USDOE - Office of Science (SC)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 1003407
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 9 Vol. 88; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
DISTRIBUTION
ION BEAMS
NANOSTRUCTURES
PARTICLE SIZE
PYROCHLORE
WAVELENGTHS