Modeling electrodeposition in LIGA microfabrication using an arbitrary-Lagrangian-Eulerian formulation for moving-boundary tracking with repeated re-meshing.
Electrodeposition is a key process in LIGA (Lithographie, Galvanoformung, Abformung - German words for lithography, electroplating and molding) - microfabrication, which is increasingly demonstrated to be a viable technology for fabricating micro-devices or parts. LIGA Electrodeposition involves complex multi-physics phenomena: (1) diffusion, migration, and convection of charged species in a centimeter-scale electrolyte-bath region and in micron-scale featurecavity or trench regions; (2) homogeneous and heterogeneous electrochemical reactions; and (3) moving deposition surface or surfaces on which metal ions (e.g., {approx} i) are electrochemically reduced to form a pure metal or an alloy.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1002030
- Report Number(s):
- SAND2003-2700C
- Country of Publication:
- United States
- Language:
- English
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