Magnetic lens apparatus for a low-voltage high-resolution electron microscope
Patent
·
OSTI ID:870631
- Palos Park, IL
A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- DOE Contract Number:
- FG02-86ER60437
- Assignee:
- Arch Development Corporation (Chicago, IL)
- Patent Number(s):
- US 5563415
- OSTI ID:
- 870631
- Country of Publication:
- United States
- Language:
- English
Limits of electron probe formation
|
journal | May 1995 |
Unconventional Lens Design
|
book | January 1982 |
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lens
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beam
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sole
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apparatus comprises
charged particles
magnetic field
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