Magnetic lens apparatus for a low-voltage high-resolution electron microscope
Patent
·
OSTI ID:379943
A lens apparatus is disclosed in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope. 6 figs.
- Assignee:
- Arch Development Corp., Chicago, IL (United States)
- Patent Number(s):
- US 5,563,415/A/
- Application Number:
- PAN: 8-487,926
- OSTI ID:
- 379943
- Resource Relation:
- Other Information: PBD: 8 Oct 1996
- Country of Publication:
- United States
- Language:
- English
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