Light-induced voltage alteration for integrated circuit analysis
Patent
·
OSTI ID:869963
- Placitas, NM
An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 5430305
- OSTI ID:
- 869963
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
light-induced
voltage
alteration
integrated
circuit
analysis
apparatus
method
described
analyzing
focused
light
beam
scanned
surface
generate
liva
signal
image
location
defects
control
logic
failure
ics
production-line
inspection
qualification
voltage alteration
light beam
integrated circuit
failure analysis
circuit analysis
/250/
voltage
alteration
integrated
circuit
analysis
apparatus
method
described
analyzing
focused
light
beam
scanned
surface
generate
liva
signal
image
location
defects
control
logic
failure
ics
production-line
inspection
qualification
voltage alteration
light beam
integrated circuit
failure analysis
circuit analysis
/250/