Light-induced voltage alteration for integrated circuit analysis
Patent
·
OSTI ID:87724
An apparatus and method are described for analyzing an integrated circuit (IC). The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC. The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs. 18 figs.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 5,430,305/A/
- Application Number:
- PAN: 8-225,021
- OSTI ID:
- 87724
- Resource Relation:
- Other Information: PBD: 4 Jul 1995
- Country of Publication:
- United States
- Language:
- English
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