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Title: Laser/plasma chemical processing of substrates

Patent ·
OSTI ID:866060
 [1]
  1. Albuquerque, NM
+ Show Author Affiliations

A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-76
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4624736
OSTI ID:
866060
Country of Publication:
United States
Language:
English

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Related Subjects

laser
plasma
chemical
processing
substrates
process
modification
substrate
surfaces
described
etching
deposition
surface
occurs
presence
reactive
species
directed
beam
coherent
light
substrate surface
chemical processing
coherent light
reactive species
chemical process
substrate surfaces
active species
directed beam
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