High-resolution, cryogenic, side-entry type specimen stage

Patent · Mon Jan 01 00:00:00 EST 1979

OSTI ID:863395

King, Wayne E ^[1]; Merkle, Karl L ^[2]

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1. Woodridge, IL
2. Clarendon Hills, IL

A high-resolution, cryogenic side-entry type specimen stage includes a copper block within which a specimen can be positioned in the electron beam of an electron microscope, one end of the copper block constituting a specimen heat exchanger, means for directing a flow of helium at cryogenic temperature into the heat exchanger, and electrical leads running from the specimen to the exterior of the microscope for four point D.C. electrical resistivity measurements.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4162401
• OSTI ID: 863395
• Country of Publication: United States
• Language: English

Related Subjects

high-resolution
cryogenic
side-entry
type
specimen
stage
copper
block
positioned
electron
beam
microscope
constituting
heat
exchanger
means
directing
flow
helium
temperature
electrical
leads
running
exterior
resistivity
measurements
cryogenic temperature
electrical leads
electron microscope
heat exchange
heat exchanger
electron beam
electrical resistivity
specimen stage
resistivity measurements
electrical lead
side-entry type
type specimen
specimen heat
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