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Title: High-resolution, cryogenic, side-entry type specimen stage

Patent ·
OSTI ID:5570094

A high-resolution, cryogenic side-entry type specimen stage includes a copper block within which a specimen can be positioned in the electron beam of an electron microscope. One end of the copper block constituting a specimen heat exchanger, means for directing a flow of helium at cryogenic temperature into the heat exchanger, and electrical leads running from the specimen to the exterior of the microscope for four point dc electrical resistivity measurements. 9 claims.

Assignee:
Dept. of Energy
Patent Number(s):
US 4162401
OSTI ID:
5570094
Resource Relation:
Patent File Date: Filed date 17 May 1978; Other Information: PAT-APPL-906,816
Country of Publication:
United States
Language:
English