A linear actuator system with 1-angstrom closed-loop control resolution and 50-millimeter travel range.
Conference
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OSTI ID:799810
We have designed and tested a novel linear actuator system with 1-angstrom closed-loop control resolution and 50-mm travel range. There are two major ultraprecision motion control techniques that have been applied to this actuator: A novel laser Doppler encoder system with multiple-reflection optics; and A specially designed high-stiffness weak-link mechanism with stacked thin metal sheets having sub-angstrom driving sensitivity with excellent stability. In this paper, we present the system design and test results of this linear actuator. Applications of this new actuator system are also discussed.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 799810
- Report Number(s):
- ANL/XFD/CP-108186; TRN: US200224%%93
- Resource Relation:
- Conference: SPIE Annual Meeting 2002, Seattle, WA (US), 07/07/2002--07/11/2002; Other Information: PBD: 12 Aug 2002
- Country of Publication:
- United States
- Language:
- English
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OSTI ID:799810