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Title: A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15-millimeter travel range

Conference ·
OSTI ID:925272

We have designed and tested a new digital signal processor (DSP)-based closed-loop feedback controller for a linear actuator system with sub-angstrom resolution and 15-mm travel range. The linear actuator system consists of a laser Doppler encoder with multiple-reflection optics [1], a high-stiffness weak-link mechanism with high driving sensitivity and stability [2], and a Texas Instruments TMS320C40 DSP-based controller for high-performance closed-loop feedback control. In this paper, we discuss the DSP-based controller design, as well as recent test results yielding step sizes below 50 picometers obtained with the atomic force microprobe setup.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
DE-AC02-06CH11357
OSTI ID:
925272
Report Number(s):
ANL/XFD/CP-116780; TRN: US200807%%92
Resource Relation:
Conference: International Society for Optical Engineering; Jul 31 - Aug 4, 2005; San Diego, CA
Country of Publication:
United States
Language:
ENGLISH

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