Silicon MIS/inversion-layer solar cells. Final report, October 1, 1981-September 30, 1982

Technical Report · Fri Oct 01 00:00:00 EDT 1982

DOI:https://doi.org/10.2172/6507274· OSTI ID:6507274

Olsen, L. C.

Silicon Metal-Insulator-Semiconductor/Inversion-Layer (MIS-IL) solar Cells were investigated as an approach to low cost terrestrial photovoltaics. Considerable progress has been made concerning the development of procedures for SiO deposition for inversion-layer formation, the characterization of the fixed chargein deposited SiO layers, surface state density at the Si-Si0 interface, fabrication and characterization of MIS-IL solar cells. Improvements were also made in the theory of MIS-IL solar cells, and utilized to calculate cell performance for a range of insulator charge and base resistivities. Inversion layer formation has been studied in several ways. MOS devices have been analyzed to determine the magnitude of the net positive charge, Q/sub POS/, versus surface potential, Psi/sub S/. In situ sheet resistance measurements have been made to determine the charge distribution within the deposited SiO layer. Finally, estimates of Q/sub POS/ obtained by comparing experimental results for MIS-IL cells and theory are compared with values of Q/sub POS/ determined for MOS structures fabricated simultaneously with the csolar cells. Cell fabrication procedures emphasized low temperature processing.

• Research Organization: Joint Center for Graduate Study, Richland, WA (USA)
• DOE Contract Number: AC02-77CH00178
• OSTI ID: 6507274
• Report Number(s): SERI/TR-1274-1-T1; ON: DE83005422
• Resource Relation: Other Information: Portions are illegible in microfiche products. Original copy available until stock is exhausted
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
MIS SOLAR CELLS
ELECTRICAL PROPERTIES
FABRICATION
MATHEMATICAL MODELS
SILICON SOLAR CELLS
BAND THEORY
CAPACITANCE
EFFICIENCY
ELECTRIC CHARGES
ELECTRIC CONDUCTIVITY
ELECTRIC CONTACTS
ELECTRIC POTENTIAL
EXPERIMENTAL DATA
PERFORMANCE
PHOTOCURRENTS
SILICON OXIDES
STABILITY
THEORETICAL DATA
CHALCOGENIDES
CURRENTS
DATA
DIRECT ENERGY CONVERTERS
ELECTRIC CURRENTS
ELECTRICAL EQUIPMENT
EQUIPMENT
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion