Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation
An optical instrument, including a chamber, an object exposed to an interior of the chamber, a source of low-pressure gas, the gas comprising at least one of low-pressure molecular hydrogen gas, low-pressure molecular oxygen and a low-pressure noble gas, the source of low pressure gas being fluidly coupled to the chamber, a low voltage source electrically coupled between the object and a remaining portion of the instrument that is exposed to the interior of the chamber so as to maintain the object at a low voltage relative to the remaining portion, and an EUV/VUV light source adapted to direct EUV/VUV light through the low pressure gas in the chamber onto the object. In such a system, when the EUV/VUV light source is activated ions of the low-pressure gas are formed and directed to the object. The ions may be ions of Hydrogen, Oxygen or a noble gas.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- KLA-Tencor Corporation (Milpitas, CA)
- Patent Number(s):
- 9,156,068
- Application Number:
- 14/482,510
- OSTI ID:
- 1223119
- Resource Relation:
- Patent File Date: 2014 Sep 10
- Country of Publication:
- United States
- Language:
- English
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