Thin film transistors on plastic substrates with reflective coatings for radiation protection
Abstract
Fabrication of silicon thin film transistors (TFT) on low-temperature plastic substrates using a reflective coating so that inexpensive plastic substrates may be used in place of standard glass, quartz, and silicon wafer-based substrates. The TFT can be used in large area low cost electronics, such as flat panel displays and portable electronics such as video cameras, personal digital assistants, and cell phones.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174560
- Patent Number(s):
- 6642085
- Application Number:
- 09/705,484
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Wolfe, Jesse D., Theiss, Steven D., Carey, Paul G., Smith, Patrick M., and Wickboldt, Paul. Thin film transistors on plastic substrates with reflective coatings for radiation protection. United States: N. p., 2003.
Web.
Wolfe, Jesse D., Theiss, Steven D., Carey, Paul G., Smith, Patrick M., & Wickboldt, Paul. Thin film transistors on plastic substrates with reflective coatings for radiation protection. United States.
Wolfe, Jesse D., Theiss, Steven D., Carey, Paul G., Smith, Patrick M., and Wickboldt, Paul. Tue .
"Thin film transistors on plastic substrates with reflective coatings for radiation protection". United States. https://www.osti.gov/servlets/purl/1174560.
@article{osti_1174560,
title = {Thin film transistors on plastic substrates with reflective coatings for radiation protection},
author = {Wolfe, Jesse D. and Theiss, Steven D. and Carey, Paul G. and Smith, Patrick M. and Wickboldt, Paul},
abstractNote = {Fabrication of silicon thin film transistors (TFT) on low-temperature plastic substrates using a reflective coating so that inexpensive plastic substrates may be used in place of standard glass, quartz, and silicon wafer-based substrates. The TFT can be used in large area low cost electronics, such as flat panel displays and portable electronics such as video cameras, personal digital assistants, and cell phones.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 04 00:00:00 EST 2003},
month = {Tue Nov 04 00:00:00 EST 2003}
}
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Works referenced in this record:
Use of hafnium dioxide in multilayer dielectric reflectors for the near uv
journal, January 1977
- Baumeister, P.; Arnon, O.
- Applied Optics, Vol. 16, Issue 2